Adaptive optics based non-null interferometry for optical free form surfaces test

An adaptive optics based non-null interferometry (ANI) is proposed for optical free form surfaces testing, in which an open-loop deformable mirror (DM) is employed as a reflective compensator, to compensate various low-order aberrations flexibly. The residual wavefront aberration is treated by the multi-configuration ray tracing (MCRT) algorithm. The MCRT algorithm based on the simultaneous ray tracing for multiple system models, in which each model has different DM surface deformation. With the MCRT algorithm, the final figure error can be extracted together with the surface misalignment aberration correction after the initial system calibration. The flexible test for free form surface is achieved with high accuracy, without auxiliary device for DM deformation monitoring. Experiments proving the feasibility, repeatability and high accuracy of the ANI were carried out to test a bi-conic surface and a paraboloidal surface, with a high stable ALPAOTM DM88. The accuracy of the final test result of the paraboloidal surface was better than 1/20 Μ PV value. It is a successful attempt in research of flexible optical free form surface metrology and would have enormous potential in future application with the development of the DM technology.