Sensitivity enhancement of microelectromechanical sensors using femtosecond laser for biological and chemical applications

Rapid, selective, and highly sensitive microelectromechanical sensors are a promising technology for biosensing, medical recognition, and the detection of chemical hazards. At the same time, the surfaces of silicon microcantilevers cannot bond with thiols and cannot be functionalized without a bonding layer, such as gold. Therefore, in past literature, the surfaces of silicon microcantilevers have been coated with gold to facilitate their bonding with the thiol functional groups on the probe layers. However, gold coating produces thermal noise in the results owing to the metallic effect. Accordingly, this study aimed to modify the surface of silicon microcantilevers by patterning it using femtosecond laser (FSL) micromachining so that it could bond with the thiol functional groups with high sensitivity. The surface patterning of silicon microcantilevers enhances their physical, micromechanical, and chemical properties, increasing sensitivity by increasing the quality factor, specific surface area, and creating trapping areas on the microcantilever surfaces. The surfaces of the silicon microcantilever were patterned by microgrooves aligned from the free end to the bounded end, with each microgroove comprising submicrogrooves. To demonstrate their use in a biosensing applications, the modified microcantilevers were functionalized to detect severe acute respiratory syndrome coronavirus 2 (SARS‐CoV‐2; COVID‐19) by immobilizing thiolated oligonucleotides on the surfaces, which worked as the probe layer. The modified biosensor was used to detect low concentrations of SSDNA sequence targets ranging from 300 nM down to 100 pM. The modified silicon‐microcantilever sensors were directly functionalized without a joining layer, such as a gold layer. The results revealed a selective response to SARS‐CoV‐2 SSDNA down to a 9‐nM concentration. To detect hazardous chemicals, the modified microcantilever was functionalized using reduced L‐cysteine to detect Pb 2+ at low concentrations down to 100 pM. The results revealed enhanced sensitivity and selectivity and demonstrated that the FSL patterning activated the microcantilevers to bond with probe layers through the interaction of the silanol created on the surface with the functional groups, such as the thiols, on the probe layers. The microcantilevers patterned with 10 microgrooves exhibited higher responses than those patterned with seven microgrooves.