Highly-sensitive expandable microsphere-based flexible pressure sensor for human-machine interaction

压力传感器 微控制器 材料科学 灵敏度(控制系统) 传感器阵列 机器人 响应时间 计算机科学 嵌入式系统 机械工程 工程类 人工智能 电子工程 机器学习 计算机图形学(图像)
作者
Ye Wang,Shengshun Duan,J. Liu,Fangzhi Zhao,Pinzhen Chen,Qiongfeng Shi,Jun Wu
出处
期刊:Journal of Micromechanics and Microengineering [IOP Publishing]
标识
DOI:10.1088/1361-6439/acfdb5
摘要

Abstract Flexible microstructural pressure sensors (FMPSs) have been widely used in different areas including health monitoring, human-machine interaction and electronic skin for their good reliability, easy fabrication, and highly sensitive sensing performance. Although the use of a sensing layer with microstructure improves the sensor sensitivity, it also results in limited sensitive pressure range, slow response and poor cyclic stability, which prevents the sensors from being utilized in applications requiring wide detect range, real-time response and high durability. Here, we propose an advanced micro-structured sensing layer through doping thermally expandable microspheres (EP) into the screen-printing carbon black (CB) slurry to enhance its mechanical properties. An FMPS is then developed based on this enhanced micro-structured sensing layer. Benefiting from the expanded microsphere-like microstructure, the as-prepared sensor features high sensitivity (37.16 kPa-1), fast response/recovery time (126 / 52 ms), and good mechanical stability (over 3000 cycles). In addition, a home-made and effective collision avoidance system consisting of a robotic arm, the pressure sensor, a MEGA2560 microcontroller unit (MCU) and a computer is constructed to indicate the sensor’s outstanding tactile perception characteristic, making it a promising candidate for intelligent robotic applications such as human-robot collaboration (HRC). Furthermore, we develop a pressure sensor array and demonstrate its ability to spatial pressure distribution perception. The developed microsphere-based pressure sensor and its array show great potential to be adopted in various monitoring and interactive applications such as humanoid robots, smart home, human-machine interaction, etc.
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