Optimization of Electron Beams for Ion Bombardment Secondary Emission Electron Gun

Abstract Electron beam fluorescence technology is an advanced non-contact measurement in rarefied flow fields, the fluorescence signal intensity is positively correlated with the electron beam current. The ion bombardment secondary emission electron gun is suitable for the technology. To enhance the beam current, COMSOL simulations and analyses were con-ducted to examine plasma density distribution in the discharge chamber under the effects of various conditions and the electric field distribution between the cathode and the spacer gap. The anode shape and discharge pressure conditions were optimized to increase plasma density. Additionally, an improved spacer structure was designed with the dual purpose of enhancing the electric field distribution between the cathode-spacer gap and improving vacuum dif-ferential effects. This design modification aims to increase the pass rate of secondary elec-trons. Both simulation and experimental results demonstrated that the performance of the optimized electron gun was effectively enhanced. When the electrode voltage remains con-stant and the discharge gas pressure is adjusted to around 8 Pa, the maximum beam current was increased from 0.9mA to 1.6 mA.