多物理
微电子机械系统
超声波传感器
传感器
PMUT公司
声学
压电
电容式微机械超声换能器
材料科学
过程(计算)
压力传感器
表面微加工
电压
电子工程
电气工程
光电子学
工程类
有限元法
结构工程
物理
复合材料
作者
Jenitha Antony Balasingam,Siddharth Swaminathan,Arezoo Emadi
出处
期刊:Internaltional Ultrasonics Symposium
日期:2020-09-07
标识
DOI:10.1109/ius46767.2020.9251361
摘要
The piezoelectric micromachined ultrasound transducer (PMUT) has gained growing attention as it tends to the shortcomings of conventional transducers and shows the potential to be implemented for various applications. Previously reported work focuses on optimizing and analyzing the acoustic output pressure for application-specific designs of PMUT. In this paper, a comprehensive study based on the Multi-User MEMS Process (MUMPs) has been conducted to investigate effect of different geometries on the PMUT performance. PMUTs of circular and rectangular shapes have been designed and fabricated using Piezo MUMPS technique. The resonant frequency and acoustic output pressure of these fabricated devices are evaluated using Multiphysics simulations and the device resonant frequencies are validated by electrical characterization. The fabricated devices are compared based on their respective areas of piezo layer. The resonant frequency of the fabricated PMUT are targeted below 3 MHz. This paper aims to achieve potential implementation of the PMUT for applications which require higher penetration while operating at low voltages and thereby consuming lesser power.
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