Characterization of Micro-Structured Optical Arrays

Characterization methods for grazing‐incidence reflecting channel arrays are discussed. Characterization of single‐reflection, unactuated micro‐structured optical arrays is required to evaluate their performance as focusing elements. Numerical simulations allow the contribution of the x‐rays reflected by the channel walls to be distinguished from the overall transmitted signal, and are applied to axial sources. Experimental results are also shown to support the simulations by translation of the channel structure parallel to a detector plane, allowing separation of reflected and transmitted x‐rays through the array on the detector.