材料科学
多晶硅
硅
薄脆饼
光学
激光器
杨氏模量
氧化硅
偏转(物理)
复合材料
模数
弹性模量
色散(光学)
图层(电子)
光电子学
氮化硅
物理
薄膜晶体管
作者
Anne‐Claire Bennis,Alexey M. Lomonosov,Z. H. Shen,Peter Hess
摘要
The Young’s modulus, density, and thickness of a 20.3μm polycrystalline silicon layer deposited on a silicon wafer covered with a ∼2.5-μm-thick silicon-oxide interface layer were measured using projection masks to generate surface acoustic waves (SAWs) with higher harmonics approaching 600MHz. The propagating SAW train was detected with a laser probe-beam-deflection setup. The characteristic strongly nonlinear dispersion effect allowed the simultaneous extraction of several unknown film properties. The dispersion was described theoretically by the boundary element method model. A Young’s modulus of 152GPa, a density of 2.25g∕cm3, and a film thickness of 20.3μm were determined for the polycrystalline silicon film.
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