Capacitance scaling system

A capacitance scaling system has been developed and consists of a commercially available four-terminal-pair LCR meter, an inductive voltage divider (IVD), and a 1000 pF air dielectric capacitor. It can calibrate capacitors up to 1 /spl mu/F in the frequency range from 50 Hz to 100 kHz. The combined standard uncertainty for the 0.01 /spl mu/F at 100 kHz is estimated to be /spl plusmn/73 fF (7.3/spl times/10/sup -6/).