Status and principle of two-photon microfabrication using femtosecond laser

Because of the advanced advantage of true three-dimensional microfabrication using femtosecond laser, femtosecond two-photon microfabrication has become a new tool for fabricating MEMS(micro-electro-mechanical systems)devices. The principle and current application of the femtosecond two-photon microfabrication are introduced. Contrast to conventional microfabrication technology, the virtues of femtosecond two-photon microfabrication is commended. The preliminary results of femtosecond laser two-photon microfabrication in the lab are reported. The potential applications and problems of two-photon microfabrication are discussed.