Fast switching Ga2O3 Schottky barrier power diode with beveled-mesa and BaTiO3 field plate edge termination

Power devices rely on ideal edge termination to suppress the electric field crowding and avoid premature breakdown before the material's critical field is reached. In this work, a hybrid electric field management configuration, featuring the combination of beveled-mesa (BM) termination and high-k oxide BaTiO3 field plate (FP), was implemented in Ga2O3 Schottky barrier diodes (SBDs). This BMFP-SBD realizes a breakdown voltage (BV) of 1.7 kV with extremely low reverse leakage current, outperforming the BM terminated SBD with BV of 0.64 kV and bare SBD with BV of 0.22 kV. Based on the temperature-dependent reverse characteristics, the dominant leakage mechanism transforms from Poole–Frenkel (P–F) emission in BM-SBD to variable-range-hopping (VRH) in BMFP-SBD at high bias. In particular, under switching conditions of di/dt up to 420 A/μs, the BMFP-SBD exhibits superior dynamic switching characteristics with a short reverse recovery time of 10.1 ns, which are comparable with those in advanced commercial SiC SBDs. These findings underscore the potential of Ga2O3 SBD enabled by BM and high-k FP edge termination for high-speed and high-voltage power electronics applications.