Design and analysis of a high pressure piezoelectric actuated microvalve

A normally open piezoelectric actuated microvalve which modulates a gas flow is fabricated and tested. This work is based on the novel concept of combining micro-machining- and fine machining. The microvalve was tested for air flow. It is shown that a flow rate of 250 ml min−1 for a pressure difference of 4 bars can be achieved. The continuous and controlled flow of gas at any stage of valve operation can be obtained. Additionally, it has been shown that almost no hysteresis occurs during the valve operation and the power consumption is very low.