Tunable Fano resonance and high-sensitivity sensor with high figure of merit in plasmonic coupled cavities

Actively tunable sharp asymmetric line shape and high-sensitivity sensor with high figure of merit (FOM) are analytically and numerically demonstrated in plasmonic coupled cavities. The Fano resonance, originating from the interference between different light pathways, is realized and effectively tuned in on-chip nanostructure composed of metal-dielectric-metal (MDM) waveguide and a pair of cavities. To investigate in detail the Fano line shape, the coupled cavities are taken as a composite cavity, and a dynamic theory is proposed, which agrees well with the numerical simulations. Subsequently, the sensing performances of the plasmonic structure is discussed and its detection sensitivity reaches 1.103 × 108. Moreover, the FOM of the plasmonic sensor can approach 2.33 × 104. These discoveries hold potential applications for on-chip nano-sensors in highly integrated photonic devices.