A new method for machining RB-SiC with high efficiency and quality: Laser assisted ultrasonic grinding

Reaction Bonded Silicon carbide (RB-SiC) ceramic is preferred material for space mirrors in aerospace field. However, the high hardness, brittleness and inhomogeneous structure bring great challenges for high quality and efficient machining. In this study, laser ablation assisted ultrasonic grinding (LAAUG) process was proposed. The high efficiency of laser ablation and high quality of ultrasonic grinding were effectively combined. Laser pre-ablation experiments were carried out firstly, and then thermal damage layer was removed through ultrasonic grinding. The results show that RB-SiC ceramics transform into relatively loose and homogeneous ablation products (SiO2 and recrystallized SiC) by laser irradiation. Moreover, it is accompanied by cracks development. Compared with conventional grinding, the maximum reduction of grinding force and surface roughness is 34 % and 13.8 %, respectively. Abrasive grain wear is significantly restrained and the percentage of plasticity removal is improved. This study indicates that LAAUG is feasible and efficient method for machining RB-SiC ceramics.