互调
订单(交换)
物理
算法
计算机科学
光电子学
财务
CMOS芯片
经济
放大器
作者
Ying Zhang,Wulin Yang,Chen Liu,Xinghua Wang,Eugene Woo Yi Zhun,Nan Wang,Yao Zhu
标识
DOI:10.1109/ius54386.2022.9957181
摘要
Four thin film bulk acoustic resonators (FBARs) with piezoelectric material of AIN, SC 0.12 Al 0.88 N, SC 0.85 Al 0.85 N and SC 0.2 Al 0.8 N are measured of 2 nd harmonic (H2) and 3 rd intermodulation distortion (IMD3), aiming to evaluate nonlinearity performance on different Scandium (Sc) doping levels (0%Sc, 12%Sc, 15 % Sc and 20 % Sc). Meanwhile, harmonic balance simulations in Advanced Design System (ADS) are performed based on nonlinear Mason model, in which five coefficients have been proven to be influential to H2 and IMD3. Corresponding to underlying physics mechanism, coefficients in H2 equations are analyzed and quantitatively compared among aforementioned piezoelectric materials. Measured IMD3 response and simulated results are in good agreement.
科研通智能强力驱动
Strongly Powered by AbleSci AI