High sensitivity composite F-P cavity fiber optic sensor based on MEMS for temperature and salinity measurement of seawater

We proposed an optical fiber salinity sensor with a composite Fabry-Perot (F-P) cavity structure for simultaneous measurement of temperature and salinity based on microelectromechanical system (MEMS) technology. The sensor contains two sensing cavities. The silicon cavity is used for temperature sensing, and the seawater cavity processed by the glass microstructure is sensitive to the refractive index of seawater for salinity sensing. At the same time, the influence of the salinity-temperature cross-sensitivity error of the seawater cavity is effectively compensated by using the temperature single parameter sensitivity characteristics of the silicon cavity. The structural design of the sensor seawater cavity includes a cross-shaped groove and a cylindrical fluid cavity. The surface hydrophilicity treatment was performed on the interior of the cavity to solve the effect of no water injection in the cavity caused by the miniaturization of the sensor. The optical path difference (OPD) demodulation method is used to demodulate the two F-P cavities with large dynamic range and high resolution. In the range of 5∼40°C and 5∼ 40 ‰, the temperature and salinity sensitivity of the sensor can reach 110.25 nm/°C and 178.75 nm/‰, respectively, and the resolution can reach 5.02 × 10-3°C and 0.0138‰. It has the advantages of mass production, high stability, and small size, which give it great potential for marine applications.