All-dielectric super-lattice metasurfaces with fivefold spatial resolution enhancement for structured illumination microscopy

Structured illumination microscopy (SIM) is a promising imaging technique for high-resolution imaging with a wide field of view. Although a periodic nanostructure is a versatile platform for engineering the spatial frequency of structured illumination patterns in SIM, challenges remain, including artifacts from Fourier space gaps. We designed an all-dielectric super-lattice metasurface (ADSLM) to generate structured illumination patterns with enhanced spatial frequency and broadened spatial frequency coverage with no intermediate frequency gaps. Our numerical simulations reveal that ADSLM-based image reconstruction is capable of producing high-contrast, artifact-free images, resulting in enhanced spatial resolution up to 5.7-fold for coherent SIM at 450 nm. Our results show that the ADSLM-SIM technique may facilitate high-resolution imaging using CMOS-compatible substrates, offering potential for compact miniaturized imaging applications.