Realization and simulation of silicon-on-sapphire mid-infrared one-dimensional photonic crystal cavities

The mid-infrared (MIR) waveband is significant for chemical and biological sensing since it covers several atmospheric windows and molecular fingerprint regions. On-chip photonic integrated one-dimensional (1D) microcavities have great potential for high-performance mid-IR sensing because of their high sensitivity and compact structure. However, high-performance 1D microcavities based on the promising silicon-on-sapphire (SoS) MIR platform have not yet been designed or realized. Based on the photonic band structure induced by 1D photonic crystals (PhC), a high-performance Bragg reflector, an inward apodized Bragg grating, and a free spectral range (FSR)-free PhC microcavity integrated system operating in the MIR waveband were developed on the SoS platform. By carefully designing the period and penetration depth of the corrugation in the Bragg reflector, a stopband of 45 nm and an extinction ratio of −12 dB were achieved. The inward apodized Bragg grating was optimized by adjusting the apodization depth and the number of periods, resulting in a quality factor of 1043 at a wavelength of 3088.4 nm. Furthermore, introducing a Fabry–Pérot (F-P) cavity between two Bragg reflectors (with side-coupled light) and precisely tuning the stopband of the Bragg reflector and the FSR of the F-P cavity enabled the realization of an FSR-free PhC microcavity. This microcavity exhibited a single deep resonance dip with subnanometer bandwidth across a record-wide operational waveband from 3025 to 3200 nm, achieving a quality factor of approximately 5090. The MIR 1D PhC microcavities on the SoS platform hold great promise for high-performance gas detection and molecular sensing in future applications.