Simulations of E–H mode transition in inductively coupled plasmas via 2D particle-in-cell/Monte Carlo collision method

Abstract This study investigates the transition mechanism from E-mode to H-mode in inductively coupled plasma (ICP) systems by employing a two-dimensional implicit electrostatic particle-in-cell/Monte Carlo collision simulation. By analyzing the electron density, energy, potential distribution, and heating dynamics under different inductive coupling powers, we identified a critical transition interval in the E–H mode transformation. This interval is characterized by a sharp increase in plasma density and a shift of the electron energy probability function from a bi-Maxwellian distribution to a single Maxwellian distribution. In E-mode, capacitive coupling effects dominate, and sheath oscillation heating leads to the non-uniformity of electron density and energy distribution. As the power increases, inductive coupling effects become dominant, driving efficient ionization through high-energy electrons and homogenizing the plasma parameters. In H-mode, inductive coupling heating becomes the primary mechanism, reducing sheath effects and enhancing energy redistribution through electron collisions. This study elucidates the dynamic mechanism of the E–H mode transition and its associated heating processes, providing a theoretical basis for optimizing ICP technology applications.