Simulations of E-H mode transition in inductively coupled plasmas via 2D particle-in-cell/Monte Carlo collision method

Abstract This study investigates the transition mechanism from E-mode to H-mode in inductively coupled plasma (ICP) systems by employing a two-dimensional implicit electrostatic particle-in-cell/Monte Carlo collision (PIC/MCC) simulation. By analyzing the electron density, energy, potential distribution, and heating dynamics under different inductive coupling powers, we identified a critical transition interval in the E-H mode transformation. This interval is characterized by a sharp increase in plasma density and a shift of the electron energy probability function (EEPF) from a bi-Maxwellian distribution to a single Maxwellian distribution. In E-mode, capacitive coupling effects dominate, and sheath oscillation heating leads to the non-uniformity of electron density and energy distribution. As the power increases, inductive coupling effects become dominant, driving efficient ionization through high-energy electrons and homogenizing the plasma parameters. In H-mode, inductive coupling heating becomes the primary mechanism, reducing sheath effects and enhancing energy redistribution through electron collisions. This study elucidates the dynamic mechanism of the E-H mode transition and its associated heating processes, providing a theoretical basis for optimizing ICP technology applications.