Surface analysis methods for structure and characters of silane film on metal surface were reviewed in this paper. Many instrumental methods, such as XPS, ATR-FTIR, RA-FTIR, SIMS, ellipsometry, EIS and so on, were applied to characterizing different silane films on different metal base surfaces. According to the research on silane film formation mechanism, silane film state, silane film structure, silane film thickness, silane film corrosion resistance and so on, factors which affect silane film properties were discussed. Various parameters were proposed for characterizing silane film. Merits and defects of various surface analysis methods were expressed. In order to acquire more chemical information, different surface analysis methods can be combined for detection at the same time. Regarding the results from these detection and analysis, new silane treatment technique for metal surface can be optimized and improved greatly. Some other kinds of surface analysis methods were also mentioned in this paper. More advanced researches in the field of silane film analysis on metal surface were prospected.