Phase defect characterization using generative adversarial networks for extreme ultraviolet lithography

The multilayer defects of mask blanks in extreme ultraviolet (EUV) lithography may cause severe reflectivity deformation and phase shift. The profile information of a multilayer defect is the key factor for mask defect compensation or repair. This paper introduces an artificial neural network framework to reconstruct the profile parameters of multilayer defects in the EUV mask blanks. With the aerial images of the defective mask blanks obtained at different illumination angles and a series of generative adversarial networks, the method enables a way of multilayer defect characterization with high accuracy.