Uniformity and Thickness Control of MoS2 During Thermolysis

A solution-based thermolysis route for MoS 2 synthesis was systematically investigated to identify the key process parameters for achieving scalable and high-quality two-dimensional MoS 2 with a uniform thickness.MoS 2 was synthesized by spin coating a solution containing (NH 4 ) 2 MoS 4 as the precursor.The crystallinity was found to be closely related to the process temperature, while the thickness exhibited a stronger dependence on the precursor solution concentration than the other process variables.However, controlling the thickness of MoS 2 is strongly dependent on the solvent properties, such as viscosity.The thickness uniformity and surface coverage could be enhanced by adding ethanolamine to a mixture of N-dimethylformamide and n-butylamine, which hindered the formation of MoS 4 2-clusters in the precursor and facilitated the synthesis of uniform thin films.With an appropriate solvent, the MoS 2 thickness can be controlled more precisely by varying the precursor concentration.