Ultra-high-Q resonances in terahertz all-silicon metasurfaces based on bound states in the continuum

High- Q metasurfaces have important applications in high-sensitivity sensing, low-threshold lasers, and nonlinear optics due to the strong local electromagnetic field enhancements. Although ultra-high- Q resonances of bound states in the continuum (BIC) metasurfaces have been rapidly developed in the optical regime, it is still a challenging task in the terahertz band for long years because of absorption loss of dielectric materials, design, and fabrication of nanostructures, and the need for high-signal-to-noise ratio and high-resolution spectral measurements. Here, a polarization-insensitive quasi-BIC resonance with a high- Q factor of 1049 in a terahertz all-silicon metasurface is experimentally achieved, exceeding the current highest record by 3 times of magnitude. And by using this ultra-high- Q metasurface, a terahertz intensity modulation with very low optical pump power is demonstrated. The proposed all-silicon metasurface can pave the way for the research and development of high- Q terahertz metasurfaces.