Thermal Modeling and Compensation of MEMS Accelerometer

As for MEMS Micro machined accelerometer, biases characteristic always varies with temperature fluctuations. Through establishing the error model between the MEMS accelerometer biases and the temperature variation in the temperature range of-20 °C ~ 60 °C, studying on the bias changed with thermal variation of MEMS accelerometer, and the test results show that MEMS accelerometer bias caused by temperature change have decreased from more than 5mg to lessen than 1mg before and after compensation. Also based on the temperature error model of the MEMS accelerometer bias in static and dynamic condition, the whole temperature characteristics have been improved to some extent, which would improve the precision in the inertial navigation systems.