铁电RAM
材料科学
铁电性
非易失性存储器
铁电聚合物
晶体管
电容
光电子学
共聚物
半导体
纳米技术
聚合物
朗缪尔-布洛杰特电影
场效应晶体管
电压
电气工程
电介质
电极
复合材料
化学
单层
物理化学
工程类
作者
Stephen Ducharme,Timothy J. Reece,Christina M. Othon,R.K. Rannow
标识
DOI:10.1109/tdmr.2005.860818
摘要
We review the potential for integrating ferroelectric polymer Langmuir-Blodgett (LB) films with semiconductor technology to produce nonvolatile ferroelectric random-access memory (NV-FRAM or NV-FeRAM) and data-storage devices. The prototype material is a copolymer consisting of 70% vinylidene fluoride (VDF) and 30% trifluoroethylene (TrFE), or P(VDF-TrFE 70:30). Recent work with LB films and more conventional solvent-formed films shows that the VDF copolymers are promising materials for nonvolatile memory applications. The prototype device is the metal-ferroelectric-insulator-semiconductor (MFIS) capacitance memory. Field-effect transistor (FET)-based devices are also discussed. The LB films afford devices with low-voltage operation, but there are two important technical hurdles that must be surmounted. First, an appropriate method must be found to control switching dynamics in the LB copolymer films. Second, the LB technology must be scaled up and incorporated into the semiconductor-manufacturing process, but since there is no precedent for mass production of LB films, it is difficult to project how long this will take.
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