Performance and Characterization of CsI:Tl thin Films for X-ray Imaging Application

High spatial resolution thin CsI:Tl scintillator films was prepared by thermal deposition method for X-ray imaging applications. We fabricated CsI:Tl scintillators ranging from 2 μm to 14 μm in thickness. We measured spacial resolution and light yield as a function of input photons energy (5-40 keV) and film thickness. To improve spatial resolution of films carbon post-deposition treatments was performed.