With large scale CdTe thin film deposition equipment which is designed by ouself independently,and use CSS deposite the CdTe thin film in the air of argon and oxygen mixture,the influence of substrate's temperature uniforminty on the thin film's thincknessand and its micorstructure were studied.XRD,SEM were also used to study its structure,composition and appearance.Finally it is found that the CdTe thin film does not have according to qulification of the orientation.The thin film is compact,the grain size is about 1 micron.the CdS/CdTe/ZnTe∶Cu small area solar cell was made of with this CdTe thin film and its efficiency has reached 8.35%.