Comparative application of measuring techniques for X-ray analysis of grinding residual stresses in Al2O3 and AIN

Grinding residual stress states in Al 2 O 3 and AlN were investigated by means of X-ray diffraction using a conventional Bragg-Brentano geometry as well as an advanced quasi-parallel beam set-up. Depending on the grinding conditions, steep near-surface residual stress gradients were found and discussed with respect to the grinding process. Furthermore, it could be proved, that residual stress analyses performed in quasi-focussing Bragg-Brentano geometry cannot resolve residual stress maxima or huge changes of the residual stress state near the surface [1]. In contrary, X-ray residual stress analyses using a quasi-parallel beam allow a highly resolved determination even of steep graded grinding residual stress states.