The manufacture of the limiting current oxygen sensor of yttria-stabilized zirconia electrolyte in low oxygen concentration was studied from theory and experiment.The results of theory analyses show that the linearity for the saturated output current of oxygen sensor vs the measured oxygen concentration can be gotten below 5% oxygen concentration.By dividing the oxygen concentration mole measure rang and designing ration of S/L,it can be realized to exact measure in low oxygen concentration using the limiting current oxygen sensor of yttria-stabilized zirconia electrolyte.