Formation of micro-groove on diamond by femtosecond laser micromachining

Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.