Effect of oxygen vacancies on the surface morphology and structural properties of WO3– x nanoparticles

WO 3 is an essential material for energy storage and catalytical technology, the oxygen vacancies level will play an essential role in its potential application. In this paper, porous tungsten oxide (WO 3– x ) with various oxygen contents was quickly fabricated by a microwave plasma-enhanced chemical vapor deposition method. A detailed characterization of structure and morphology features with the plasma handling process was recorded by X-ray diffraction, field-emission scanning electron microscopy and transmission electron microscopy, respectively. The etching mechanism of porous WO 3– x under H 2 plasma was discussed based on the systemically characterization. These results will help us to design the active sites or structure in the metal oxide materials.