Reviewing the Evolution of the NAND Flash Technology

This paper reviews the recent historical trends of the NAND Flash technology, highlighting the evolution of its main parameters and explaining what allowed it to become not only the most important integrated solution for nonvolatile storage of high volumes of data but also a strong rival eroding the market share of hard-disk drives. The scaling trend followed by planar arrays will be discussed with close attention, along with the major physical constraints impacting the performance and the reliability of modern deca-nanometer technologies. This will make clear why the development of further planar nodes with feature size below ~15 nm, representing today's state of the art, can be considered less favorable than turning all the efforts toward the integration of 3-D arrays. The most promising 3-D architectures will then be reviewed, discussing their benefits and issues and addressing the impact of the change of the integration paradigm from the standpoint of the major NAND applications.