Optimization of three-dimensional metamaterials for terahertz energy harvesting

This work focuses on finite element modeling (FEM) of a three-dimensional metamaterial used as an absorber for terahertz energy harvesting. The metamaterial consists of patterned pillars of an SU-8 dielectric photoresist coupled to a copper metal overlayer. Our study shows that the electromagnetic performance of the metamaterial is dependent on the following characteristic design parameters of the SU-8 dielectric: pillar height, bottom side length, and spacing between adjacent pillars. Using FEM, the metamaterial geometry is successfully optimized and the surface plasmon can be tuned to a peak frequency of 1.2 THz and a maximum terahertz absorption amplitude of 30%.