Novel ZnS: Cu dual-mode sensor based on monolithic integrated photodetector

Abstract Mechanoluminescence (ML) is the emission of photons from materials in response to a mechanical stimulus, with a good correlation between ML intensity and stress amplitude. Depositing a ZnS: Cu layer on the monolithically integrated photodetector surface to construct a stress and light dual-mode sensor. The developed sensor achieves a high-stress sensitivity with a detection limit of 0.525 MPa, a response time under 10 ms, and a minimum resolution of 0.1 MPa. Furthermore, the product is straightforward to manufacture and lightweight. Additionally, the ZnS: Cu layer's excellent light transmission allows for dual-mode stress and light detection, making it ideal for deployment in large industrial machinery. This work not only proposes a novel dual-mode sensor but also provides a promising approach to extending photodetector utility and functionality by applying a film to the photodetector, opening pathways for versatile applications.