自动化
计算机科学
嵌入式系统
系统工程
工程类
制造工程
机械工程
标识
DOI:10.1109/cstic61820.2024.10531903
摘要
Automated Material Handling Systems (AMHS) are an essential component of semiconductor smart factories. Traditional AMHS vendors focus mainly on transport management and path calculation based on automated handling equipment. To realize the digital transformation of modern semiconductor fabs, HIMC has introduced a comprehensive AMHS digital solution tailored to the semiconductor smart factories. In addition to Material Control System (MCS), Multiple OHT Controller (MOC) and subsystem control software, the solution also incorporates intelligent order dispatching and path optimization modules developed through algorithms and artificial intelligence technologies. Additionally, it employs digital twin technology, 3D rendering techniques, and big data analytics to achieve the real-time synchronization of the physical and digital worlds by converting two-dimensional data into three-dimensional visualizations. Through the implementation of these digitalization solutions, AMHS can achieve enhanced automation, efficiency, and sustainability, thereby improving the productivity and competitiveness of semiconductor smart factories.
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