聚酰亚胺
离子液体
材料科学
电介质
介电常数
微电子
多孔性
化学工程
介电损耗
吸收(声学)
多孔介质
离子键合
复合材料
高分子化学
纳米技术
光电子学
有机化学
离子
化学
工程类
催化作用
图层(电子)
作者
Xiaodi Dong,Baoquan Wan,Ming‐Sheng Zheng,Haiping Xu,Jiefeng Gao,George Chen,Jun‐Wei Zha
出处
期刊:Polymer
[Elsevier]
日期:2022-11-01
卷期号:260: 125382-125382
被引量:5
标识
DOI:10.1016/j.polymer.2022.125382
摘要
There is an urgent need for interlayer dielectric materials with ultralow dielectric properties, high temperature resistance and hydrophobicity in the field of microelectronics due to the development of high-density integration and miniaturization of electronic components. Herein, porous polyimide (PI) films were successfully prepared by using ionic liquid (1-Butyl-3-methylimidazolium tetrafluoroborate, [BMIM][BF4]) as porogen for the first time. Based on the inherent good compatibility between [BMIM][[BF4] and polyimide, this ionic liquid could be uniformly dispersed in the PI matrix, thus creating a favorable prerequisite for the formation of pores. It was demonstrated that the optimized rearrangement of PI molecular chains induced by etching process of [BMIM][BF4] led to the generation of pores and the reduction of chain spacing, which endow the porous films excellent dielectric, thermal and mechanical properties. The film with the porosity ratio of 85 vol% exhibited minimum permittivity of 1.5 at a wide range from 102 to 106 Hz, high temperature of 5% weight loss about 532 °C. The porous PI films not only provide the promising ultralow permittivity dielectric materials for the development of modern integrated circuits, but also present potential application in adsorption separation and special electromagnetic detection.
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