A Heterogeneously Integrated Silicon Photonic/LiNbO3Electro-Optic Modulator
作者
Nicholas Boynton,Hong Cai,Michael Gehl,Shawn Arterburn,Christina Dallo,Andrew Pomerene,Andrew Starbuck,Dana Hood,Douglas C. Trotter,Thomas A. Friedmann,Anthony L. Lentine,Christopher T. DeRose
标识
DOI：10.1109/oic.2019.8714430
摘要
We present a heterogeneous CMOS compatible Mach-Zehnder modulator simultaneously utilizing the electro-optic effect in LiNbO3and taking advantage of the benefits of silicon photonics. Aside from the final step of bonding the LiNbO3, this modulator can be entirely fabricated using CMOS facilities.
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(2025-6-4)
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