Research and Test of the Circuit for MEMS-Based Piezoelectric Micro Energy Harvesting Device

Micro energy harvesting technology is to utility some effects to convert the energy around the enviroment into electrical energy.So it can supply the energy for the MEMS devices in the embedded system and wireless sensors networks.This paper discusses a piezoelectric micro energy harvesting device which is based MEMS technology.This device works in low frequency environment.When excited by the vibration,the device can convert the mechanical energy into electrical energy.But the direct output electrical energy of the energy harvesting device is AC voltage and usually can not be supplied to the devices directly.So AC-DC circuit is used to convert AC voltage into DC voltage and then it will be supplied to the MEMS devices.This paper gives the testing circuit of the micro energy harvesting device and analyzes the result.It demonstrates the feasibility of the micro energy harvesting in the low frequency enviroment.