材料科学
陶瓷
温度循环
聚合物
热稳定性
涂层
复合材料
无定形固体
硼烷
硅
胶粘剂
玻璃化转变
X射线光电子能谱
化学工程
冶金
热的
有机化学
化学
物理
图层(电子)
气象学
工程类
催化作用
作者
Jan Bernauer,Samuel Aeneas Kredel,Emanuel Ionescu,Ralf Riedel
标识
DOI:10.1002/adem.202301820
摘要
In the present work, transition metal‐containing preceramic silicon polymers were synthesized via chemical modification of a commercially available organopolysilazane with Hf and Ta amido complexes as well as with borane dimethyl sulfide complex. The incorporation of transition metals into the polymer structure, their influence on ceramization and processability were thoroughly investigated. Moreover, the prepared preceramics were coated onto silicon wafers via spin coating and converted into crack‐free, amorphous SiHfTa(B)CN‐based ceramic coatings with excellent adhesion to the substrate. The composition of the ceramic coatings was investigated via X‐ray photoelectron spectroscopy (XPS) and their high‐temperature behavior was studied via oxidation tests performed at 1100 °C. Moreover, a thermal cycling procedure to temperatures above 1250 °C with rapid heating and cooling rates (i.e., in the range of 100–120 K s −1 ) was applied to the ceramic coating, which showed no damage even after ten thermal cycles, indicating their outstanding performance and their potential for use as environmental barrier coatings at high temperatures.
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