Generation of carbon and oxygen in CZ elemental crystal furnace and the influence of monocrystalline silicon growth

In this paper,elemental crystal furnace,FT-CZ2008 type,made in Ferro Tec group,is research object.The basic structure of CZ elemental crystal furnace is introduced,and the growth techniques of monocrystalline silicon are expounded.Influence factors of carbon and oxygen generating in this system is analyzed from 3 aspects,the structure of elemental crystal furnace and monocrystalline silicon production technology and others.Experimental data and influence degree from carbon and oxygen to monocrystalline silicon production quality is concluded.Help for enterprise can be expected in further improving structure of elemental crystal furnace,reforming technology of the monocrystalline silicon growth and improving the quality of the monocrystalline silicon production.