Combination analysis of metal oxides using ESCA, AES, and SIMS

Combination ESCA, AES, and SIMS analyses have been conducted on high purity metal foils of Fe, Ni, Cr, and Mo to investigate oxides formed on sputter-cleaned surfaces. Results are given for the controlled oxidation of Fe and Ni metals and the rapid sequential analysis by the three techniques. Oxygen signals from the three methods are shown to have identical dependence on oxygen dosage during the initial stages of oxidation for these two metal-oxygen systems. ESCA and SIMS results of both systems are in agreement with divalent oxide formation at oxygen dosages up to 60 L for Fe and 50 L for Ni. Preliminary results for Cr-O and Mo-O systems are also reported.