Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides

We describe the integration of optically pumped silicon nanocrystals (Si-ncs) embedded in SiO(2) with low loss silicon nitride slab waveguides. An emission waveguide containing Si-ncs with a broad band emission centered at 850 nm, together with a low loss transmission silicon nitride waveguide forms a two section device. The waveguides are fabricated via the deposition of SiO(x) and silicon nitride using ECR-PECVD. Incorporation of hydrogen through annealing, while beneficial to emission from the Si-ncs, is found to increase material absorption in silicon nitride. This is reconciled by annealing at low temperature. This work shows clearly the potential for this material system as a means for the integration of optical emission and waveguiding using a wholly VLSI compatible processing technology. We further suggest that immediate applications exist in particular in the field of evanescent sensing.