Abstract Compressively strained Ge 1-x Sn x films (x = 0.04, 0.08, 0.14) have been grown on Ge(004) substrates by Molecular Beam Epitaxy. The wavelength dependence of the refractive index is deduced as n(x,λ)=nGe(λ)+(‐2+3.5λ)x+5(1‐λ)x2 in the near-infrared range (NIR) (800–1700 nm) for Ge 1-x Sn x alloy films. That is similar to Si 1-x Ge x alloy films. The Hall measurement shows that the donor levels decrease due to dislocation at room temperature. Temperature dependence of the electron mobility for Ge 1-x Sn x films reveals that strain-induced defects lower the carrier mobility from 10 K to 310 K. The maximum carrier mobility reaches 2082 cm 2 /V·s at T = 122 K for Ge 0.96 Sn 0.04 /Ge film. These results indicate that Sn-doping has great influences on electronic properties for Ge 1-x Sn x alloys. Our investigations may be helpful for fabricating the high performance optoelectronic devices.