材料科学
溅射沉积
薄膜
溅射
沉积(地质)
腔磁控管
基质(水族馆)
物理气相沉积
扫描电子显微镜
化学工程
高功率脉冲磁控溅射
涂层
标识
DOI:10.1166/jnn.2020.17582
摘要
We have developed a HA nano-coating technology suitable for dental and orthopedic implants using RF magnetron sputtering method which can achieve excellent adhesion to titanium compared with other various PVD coating technologies. As a result, the HA thin film prepared by RF magnetron sputtering has a thickness of about 1.6 [μm] and its adhesion force to base metal is about 11.93 [N] or more and Ca/P ratio is about 1.64, which is suitable for dental and orthopedic implants.
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