Study on microlens-array confocal microscopy measurement technology

With the defect of low scanning efficiency and complex mechanism,the conventional confocal detection was finished by single-point mechanically scanning mode.Therefore,microlens-array confocal arrangement measurement had been a hot research topic,which changed the single-point scanning mode to multi-channel parallel detection to gain the full time synchronous measurement.In the meanwhile,the multi-beam confocal detection system owned high working speed and little effect on scanning process from light source or vibration noise.The principle,recent progress and development tendency of several typical microlens-array confocal microscopy measurement techniques are mainly discussed.