时域有限差分法
材料科学
光子晶体
半径
波导管
戒指(化学)
蚀刻(微加工)
光学
灵敏度(控制系统)
波长
光电子学
图层(电子)
折射率
硅
纳米技术
物理
电子工程
工程类
有机化学
计算机科学
化学
计算机安全
作者
Amit Goyal,Saurabh Pal
出处
期刊:Physica Scripta
[IOP Publishing]
日期:2015-01-28
卷期号:90 (2): 025503-025503
被引量:29
标识
DOI:10.1088/0031-8949/90/2/025503
摘要
In this paper, we have proposed a photonic crystal waveguide with a ring-shaped structure of holes for gas sensing applications. The behaviour of the sensor is analysed by using the 3D finite difference time domain (FDTD) method. The proposed structure is designed by etching ring-shaped holes in a silicon layer and by deliberately introducing a row of holes in the waveguide (line-defect). In order to improve the sensitivity, ring-shaped holes are over-etched by a finite depth in the underneath oxide layer. The transmission spectral characteristics and the sensitivity are analysed by varying the defect-radius and the etch-depth. The proposed structure shows a 0.05 nm shift in the cut-off wavelength, corresponding to a refractive index change of 10−4.
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