Experimental Research on an Active Vibration Control System of the Step and Scan Lithography Vibration Isolation Platform

According to the vibration characteristic of the step and scan lithography,the vibration reduction system of the vibration isolation platform is designed,and the experimental research on its active vibration control is conclucted.The testing result indicates that the active vibration control system of the step and scan lithography vibration isolation platform can reduce the vibration of the lithography caused by the moving parts effectively and the damping effect is satisfactory.