A comparison between the experimental results and the thermal simulation for the fabrication of micro hot-plate

A micro hot-plate has been developed which offers a wide range temperature control between room temperature and 600/spl deg/C. It can be fabricated using silicon bulk-micromachining and silicon thin film technology. The micro hot-plate consists of a thin film heater (Pt/Cr layer) combined with thermal oxide and E-Beam evaporated oxide. The membrane temperature reaches about 463/spl deg/C at 180 mW, and its thermal distributions are measured by IR thermo-vision system for the first time. When we compare the experimental results with the FIDAP simulation for the first time, there were temperature differences about 80/spl deg/C (higher value in simulation results). However, the response time and temperature distribution on the membrane were similar to the experimental results.