A MEMS Resonant Differential Pressure Sensor With High Accuracy by Integrated Temperature Sensor and Static Pressure Sensor

This letter presents a MEMS resonant differential pressure sensor with an integrated temperature sensor and a static pressure sensor to address the issue of side effects of temperature and static pressure on measurement accuracies of resonant differential pressure microsensors. In this microsensor, two resonators were employed on the pressure sensitive diaphragm to sense differential pressure while a Pt-film-resistor was included as the temperature sensor and an additional resonator was positioned on the framework as the static pressure sensor. Microfabrication was conducted to manufacture the resonant microsensor and key performances were quantified as 79.76 Hz/kPa (~1036 ppm/kPa) of differential pressure sensitivity, $6.22 \Omega $ /°C of temperature sensor sensitivity and −0.47 Hz/kPa of static pressure sensor sensitivity. Based on compensations of temperature and static pressure, a measurement accuracy of 0.02%FS was achieved for the developed microsensor under the differential pressure range from 0 to 100 kPa, the temperature range from −20°C to 60°C and the static pressure range from 110 kPa to 200 kPa.