Design and Fabrication of Hybrid Lithium Niobate Electro-Optic Modulators

A process for designing and fabricating hybrid lithium niobate Mach-Zehnder electro-optic modulators is described. The design uses unetched thin-film lithium niobate bonded to a foundry-fabricated chip containing planarized silicon nitride waveguides. We demonstrate 3-dB electro-optic bandwidth greater than 110 GHz and $\mathrm{V}\pi \mathrm{L}$ of 2.4 V.cm, at 1310 nm wavelength.