The Catalytic Activity of Amberlyst A-21 to Disproportionation of Trichlorosilane at Critical Temperatures

Catalytic properties of anion-exchange resin Amberlyst A-21 in gas-phase disproportionation of trichlorosilane (TCS) at resine critical temperature (up to 423 K) were studied for the first time. The thermodesorprtion followed by pyrolysis were used to establish thermal destruction of Amberlyst A-21 undergoes to form methyl chloride and of the spherical matrix at above 423 K. When Amberlyst A-21 operated at 333–423 K, the apparent activation energy of TCS disproportionation was 37.12 kJ/mol, and the reaction rate constant 0.80 s –1 (at 423 K). Three-month testing of the resin for TCS disproportionation at 423 K demonstrated the stabile catalytic activity.